Full specifications
Model Number | NM-EFD1B |
---|---|
Productivity | 0.56s/IC (Under the fastest conditions) 0.75s/IC for thermosonic bonding(Including process time of 0.2 seconds. Under the fastest conditions) |
Placement Accuracy | XY (3σ at PFSC conditions): ±7µm (Flip bonding), ±15µm (With pre-centering), ±25µm (Direct bonding) |
Substrate dimensions | L 50 x W 30 to L 280 x W 140 (For thermosonic: L 200mm x W 150mm) |
Die dimensions (mm) | L 0.25 x W 0.25 to L 6 x W 6 |
Number of die types | Up to 12 types (For AWC)/ Up to 10 types (Tray with the palette changer)/ Up to 5 types (Wafer frame with the palette changer) |
Configuration of die feeder | Wafer frame, Pre-expanded ring, Tray |
Adhesive dispenser | Air-powered writing, Stamping pin |
Bonding Load | Pneumatic head: 0.5N to 10N (Option: 1N to 50N) VCM head for thermosonic process: 1N to 50N (Option: 2N to 100N) |
Head Heating | Constant heating, Up to 250°C for the pneumatic head, Up to 300°C for the VCM head |
Substrate Heating | Constant heating, Up to 300°C |
Number of nozzles | Up to 24 nozzles (Pickup nozzle, Bonding nozzle, Stamping tool) (Not available for the thermosonic nozzle) |
Power Source | 3-phase AC 200V ±10V, 50 / 60Hz, Up to 4kVA (Up to 7kVA for heating specification) |
Pneumatic Source | 0.5MPa, 30L/min (A.N.R.) (Up to 150L/min for full-featured machine including cooling air) |
Dimensions (mm) | Standard specification (Up to 200mm substrate length. including loader/unloader) W 1950mm x D 1370mm x H 1720mm (Machine body: W 1190 mm x D 1190mm x H 1720mm) |
Mass (Weight) | 2200kg (including loader / unloader) |
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