Ultrahigh Accurate 3-D Profilometer
Designed to measure aspherical lenses & molds, freeform optics, mirrors and any other precision component requiring nanometer level accuracy
Key features
| Ultra-accurate measurement with highest stability |
| Automatic NC program generation |
| Extensive library of optional software |
In the 1980s, Panasonic was the first company in the world to commercialize glass-molded aspheric lenses. UA3P was developed under thus efforts.
"No measurement, No production." This slogan was born during difficult challenges that Panasonic was facing.
UA3P has been used by customers around the world since its launching and has now gained their trust as the primary standard in the optical industry. For example, lenses are produced through the processes of creating molds with a processing machine and using a molding machine to form lens products. In order to control production conditions that is changing constantly, measuring equipment with higher precision that enables us to capture "changes" is indispensable. We believe that high-quality manufacturing can only be achieved with high-precision measuring equipment.
The world's highest-level 3-D profilometer "UA3P"
In the years ahead, its nanometer-level reproducibility will contribute to the realization of the dreams not only in the optical industry but in the wide range of customers in "Measurement". Evolving UA3P is our mission to society.
The Panasonic UA3P profilometer series is designed to measure aspherical lenses & molds, freeform optics, mirrors and any other precision component requiring nanometer level accuracy ranging up to 600mm x 600mm (Measurement area 500x500mm). Different machine models are available to meet your optical & high aspect ratio metrology needs.
The various UA3P models all offer users the accuracy of AFM technology with the measurement range of a CMM. Our unique approach is based on our Panasonic Atomic Force Probe technology (AFP) by usage of a stylus and HeNe laser-based interferometric XYZ axis positioning.
Coupling this technology with a solid granite-base we provide to our customers a world-leading metrology system on a nanometer level as a unique metrology tool.
Features of UA3P
The UA3P Series
ranging from standard to large-scale, twin probe to high-accuracy equipment
Standard equipment
- UA3P-300
- UA3P-400
Large-scale equipment
- UA3P-500H / -550H
- UA3P-650H
- UA3P-700H
Twin probe
Top surface and side surface profilometer
UA3P-400T
High-accuracy equipment
- UA3P-3100
- UA3P-4000
- UA3P-5000H
Technology for ultra-precise measurement
UA3P, which is supporting evolution of optical components, is the primary standard in the optical industry.
He-Ne laser length measurement technology has realized absolute coordinates in nano precision.
Coordinate measurement technology
The coordinate system of the instrument consists of 3 reference planes (mirrors) independent of the stage, and each XYZ axis is measured with 0.3 nm resolution by laser interferometry using a frequency stabilized He-Ne laser as a light source. These technology suppresses the influence of the squareness and straightness of the stage, and achieves high-precision measurement.
Measuring probes
Top surface measurement probe/ AFP
High precision scanning measurement is possible with ultra-low measuring force on an object. Stylus is held by micro-air slider, and focusing laser detects movement of the stylus and follows AFP position to the shape of the object with kept measuring force is constant.
Measuring probes
Side surface measurement probe / S-AFP
The tilt of a probe mirror detected with high precision is fed back to the XY stages to enable scanning measurement with low contact force (0.3 mN). Enabling to measure pastic product such as a lens holder (barrel), without deforming.
Cases
UA3P can be used for different areas of application such as the following.
Aspherical lens & Mold measurement
To evaluate the of the 3D form measurement.
Inclination and decentering measurement between lens surfaces
To evaluate any tilt and decentering of the optical axis between lens faces.
Off-axis mirror surface measurement
To evaluate an object that lacks a design origin, such as an X-ray mirror.
Diffractive lens shape measurement
A refractive lens can be measured to evaluate the shape of phase steps.
Surface measurement of free-form curved lens
Such as molds to produce long lenses for laser beam printers.
Lens tool mark measurement
Contours on polished lenses and glass-mold lenses can be evaluated.
Form measurement of large object. (3D)
Large optical parts, such as molds for head-up displays (HUDs) can be evaluated.
Measurement of optical axis of mobile camera lens
Shapes of molds, lenses, and barrels in lens units can be evaluated.
Measurement of barrel multi-stage cylinder
The concentricity of cylinder cross sections, such as lens barrels, can be evaluated.
Wafer level lens measurement
Wafer level lenses can be continuously measured to evaluate their shape.
Decenter evaluation based on interlocked surface
The tilt and decenter of each lens face can be evaluated with reference to the fitting face of the lenses.
Specifications
| Type | Standard equipment | Large-scale equipment | Twin probe (top surface and side surface profilometer) | High-accuracy equipment | |||||
|---|---|---|---|---|---|---|---|---|---|
| Model | UA3P-300 | UA3P-400 | UA3P-500H/550H | UA3P-650H | UA3P-700H | UA3P-400T *2 | UA3P-3100 | UA3P-4000 | UA3P-5000H |
| Outer dimensions (WxDxH) mm | 700x800x1510 | 1010x1110x1450 | 1260x1510x1580 | 2100x1830x2110 | 2100x1830x2200 | 1070x1230x1530 | 760-860x1580 | 1060x1200x1610 | 1300x1560x1900 |
| Mass of main body | 700kg (Others 150kg) | 1200kg (Others 150kg) | 2400kg (Others 300kg) | 8500kg (Others 300kg) | 9000kg (Others 300kg) | 750kg | 900kg (Others 200kg) | 1500kg (Others 300kg) | 3200kg (Others 300kg) |
| Measuring range (X,Y,Z axes) mm | 30x30x20 | 100x100x35 | 200x200x45 | 400x400x120 + ∅500x120 | 500x500x120 | 100x100x50 | 3100-A30 30x30x20 | 4000-A100 100x100x35 | 200x200x50 |
| Measured object placement area (X,Y,Z axes) mm | 100x100x120 | 220x220x132 | 300x270x252.5 | 600x600x300 | 600x600x330 | 200x200x140 | 130x130x120 | 210x210x127.5 | 300x300x255 |
| Resolution | 0.3mm | ||||||||
| Maximum inclination angle for top-surface measurement | 75° | 75° | 75° | 75° | 75° | ||||
| Angle for side-surface measurement | - | Horizontal : 45~90°/Vertical : 80~90° | - | ||||||
| Measurement accuracy with top-surface probe * when using the top ruby stylus or top ceramic stylus | 30° or less :(±)0.05µm (round trip) | 30° or less :(±)0.05µm (round trip) | 30° or less :(±)0.05µm (round trip) | 30° or less :(±)0.05µm (round trip) | 30° or less :(±)0.05µm (round trip) | 30° or less :(±)0.04µm (round trip) | 30° or less :(±)0.05µm (round trip) | ||
| (Reference) Case of normal direction display (ND) 0~70° : ±0.05µm | |||||||||
| Measurement accuracy by coordinate axis (XY axis measurement accuracy) | 100mm or less : 0.05µm | 100mm or less : 0.05µm | 100mm or less : 0.05µm | 100mm or less : 0.05µm | |||||
| Measurement speed | 0.005~5mm/sec | 0.01~10mm/sec | 0.02~20mm/sec | 0.032~32mm/sec | Top 0.01~10mm/sec, Side 0.01~5mm/sec | 0.005~5mm/sec | 0.01~10mm/sec | 0.02~20mm/sec | |
| Operating environment *1 Temperature / Humidity / Vibration | 20~23°C | 20~25°C | 20~23°C | ||||||
| Required power source | AC100V±5%/14A | ||||||||
| Air : Pressure 0.5MPa~1.0MPa Flow rate | 100 L/min(ANR) | 150 L/min(ANR) | 250 L/min(ANR) | 450 L/min(ANR) | 100 L/min(ANR) | 150 L/min(ANR) | 200 L/min(ANR) | 350 L/min(ANR) | |
| Standard accessories | Top ceramic stylus R500µm | Top ceramic stylus R500µm | Top ceramic stylus R500µm | Top ceramic stylus R500µm | |||||
Function for top-surface profilometer 
Function for side-surface profilometer
*1 Wind from air conditioners should not directly blow onto the equipment
*2 This product is categorized as a product (or technology) that qualifies as a regulated cargo as specified by the Foreign and Foreign Trade Act. To export or transfer abroad applicable products (or technology), you must gain permission for export in advance from the Japanese government.
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