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Microelectronics

APX300 Dry Etcher

The APX300 (option S) Dry Etcher is the perfect dry etching equipment for silicon and compound semiconductors. It incorporates a multi-wafer direct cooling system for optimal control of wafer temperature, as well as MSC-ICP (Multi-Spiral Coil type ICP) and BM-ICP (Beamed-type ICP) plasma sources to generate high density plasma. In this way, it achieves a uniform etching profile in a very short timeframe. Building upon the single wafer process chamber of the previous model (Panasonic E620), combined with enhanced process options and two different handling systems, the APX300 (option S) is extremely fast and covers a wide range of process demands.

Features and benefits of Panasonic's APX300 (option S) Dry Etcher  The Panasonic APX300 (option S) Dry Etcher can process wafers such as power devices, SAW filters, communication devices, MEMS sensors and many more. The APX300 (option S) is the successor to the previous best-selling Panasonic E620 and utilizes the same single wafer process chamber.  Two plasma sources are available: MSC-ICP (Multi-Spiral Coil type ICP) and BM-ICP (Beamed-type ICP). MSC-ICP is Panasonic's latest technology, developed to realize highly accurate processing. BM-ICP offers higher electron density and achieves faster processing, covering a wide range of process demands.  In addition, two types of handling systems are available: Atmospheric Loading Supply and Vacuum Load Lock Supply.  The Panasonic APX300 (option S) Dry Etcher is CE certified.

Software

iLNB: line management system

FeaturesThe revolutionary integrated  line  management  system  is  the basis for  controlling the  entire  production line. It  is  not limited  to  Panasonic machines but  also  integrates  third-party  equipment such as PCB transfer systems, laser markers, AOI, SPI and ovens. Conventional systems require a number of PCs to control different machine types from different suppliers. The iLNB controls the entire line with only one PC.  iLNB  significantly improves overall  productivity.  Production  data  and  production  changeover  of  all equipment, such as Panasonic’s placement machines as well as non-Panasonic machines including AOI, SPI, reflow  ovens  and  others,  can  be  controlled.  All  collected  data  are  transferred  to  a remote central computer. Small  errors such  as pick-up  errors  can  be recovered from  that  central  point.  Automatic production changeover is also possible. With the iLNB, users can manage automatic product changeovers and have an E-Link which provides an interface for information input and output, for machine control, management of components per feeder, and communication with a GEM/PLC. iLNB provides total control of the production line by interfacing between Panasonic and non-Panasonic machines, acting as one-stop channel. With the iLNB Users can manage automatic product changeovers and have an E-Link which provides an interface for information in- and output, for machine control, management of component per feeder and a communication to GEM/PLC. Automatic changeover Registration of automatic changeover recipeLine automatic changeoverAutomatic changeover monitoringLine operation monitoringE-Link interface for Information inputDownload / edit of scheduleE-Link interface for Information outputOperational information outputTrace information outputMachine status outputE-Link interface for machine controlMachine interlock; production start controlE-Link interface for feeder writeWriting of component data by an external systemCommunications to GEM/PLCSECS2/GEM communicationOPC communicationIO/RS-232C communication

Software

Adaptive Process Control

Mounting feed-forward function Components can be placed correctly based on the solder printing position. Placement skip data feed-forward/Block recognition data feed-forward Placement machine recognition time reduction based on feed-forward discrepancy data. Misplacement of components using a modular placement machine can be prevented based on feed-forward solder/land* printing defect block data.*When inspecting lands on which package components are placed using flux epoxy. Printing position data feedback The solder printing position misalignment is measured by the inspection machine. The positioning correction is transferred by means of feedback to the screen printer. The solder printing area is measured by the inspection equipment. The stencil cleaning direction can be compared with the reference value by means of feedback.

Microelectronics

MD-P300 Flip-chip Bonder

The MD-P300 Flip-chip Bonder is process-flexible, combining flip-chip and thermosonic bonding in a single, small-footprint solution.The MD-P300 contributes to the cost-effective production (high yield, high throughput) of value-added devices. The MD-P300 can achieve high speed and high accuracy bonding through its low gravity point and lightweight bonding head. The MD-P300 supports 300 mm (12") wafers, and is an ideal solution for COB hybrid assembly in combination with an in-line Panasonic SMT placement machine.The MD-P300 is capable of fast cycle times and a placement accuracy of +/-5 μm at 0.5 seconds per IC (dry run) - with thermosonic processes at 0.65 seconds, including process times.

Placement (SMT)

Offline Camera Unit

Reduce offline data creation time and realization of machine downtime zero

Software

Remote-verwalteter Dienst

Remotely Managed Service (RMS) vereint Technikverantwortliche in der Cloud, um reproduzierbare Unterhaltungserlebnisse zu gewährleisten

Software

Medienproduktions-Suite

Software-Plattform, um Medien intelligent zu verwalten und Ihre Kreativität zu erweitern. Die Integration der Software realisiert einen effektiven Betrieb. Einfaches Hinzufügen verschiedener umfangreicher Funktionen auf einer Softwareplattform.

Geometry Manager Pro

ET-UK20

Geometric Adjustment für 3D-Videomapping und komplexe Projektionseinstellungen.

Frames

ET-RFD40

Die Flugrahmen sind robust und dennoch optisch ansprechend gestaltet. Zusätzlich verfügen sie über horizontale und vertikale Justagemöglichkeiten um die ideale Projektionsposition einzustellen.

Frames

ET-RFD60

The rental frames are sturdy, strong and visually appealing. In addition, they offer a horizontal and vertical adjustment feature for the ideal projector position. 

Frames

ET-RFD65

The Rental Frame is designed for compatibility with PT-RQ25K/PT-RQ18K/PT- RZ24K/PT-RZ17K projectors.

Frames

ET-RFD70

The Rental Frame is designed for compatibility with PT-RQ35K, PT-RZ34K projectors.