Products

The APX300 (option S) Dry Etcher is the perfect dry etching equipment for silicon and compound semiconductors. It incorporates a multi-wafer direct cooling system for optimal control of wafer temperature, as well as MSC-ICP (Multi-Spiral Coil type ICP) and BM-ICP (Beamed-type ICP) plasma sources to generate high density plasma. In this way, it achieves a uniform etching profile in a very short timeframe. Building upon the single wafer process chamber of the previous model (Panasonic E620), combined with enhanced process options and two different handling systems, the APX300 (option S) is extremely fast and covers a wide range of process demands.

Features and benefits of Panasonic's APX300 (option S) Dry Etcher  The Panasonic APX300 (option S) Dry Etcher can process wafers such as power devices, SAW filters, communication devices, MEMS sensors and many more. The APX300 (option S) is the successor to the previous best-selling Panasonic E620 and utilizes the same single wafer process chamber.  Two plasma sources are available: MSC-ICP (Multi-Spiral Coil type ICP) and BM-ICP (Beamed-type ICP). MSC-ICP is Panasonic's latest technology, developed to realize highly accurate processing. BM-ICP offers higher electron density and achieves faster processing, covering a wide range of process demands.  In addition, two types of handling systems are available: Atmospheric Loading Supply and Vacuum Load Lock Supply.  The Panasonic APX300 (option S) Dry Etcher is CE certified.

THE ROTATING HAND STRAP (FZ-VSTL11U) IS DESIGNED FOR TOUGHBOOK S1

THE DESKTOP PORT REPLICATOR (CF-VEB201U) IS DESIGNED FOR COMPATIBILITY WITH TOUGHBOOK G2, G1 MODELS

The Active Stylus Pen (FZ-VNPN11U) is designed for compatibility with TOUGHBOOK N1.

THE STANDARD BATTERY (FZ-VZSU1TU) IS A BATTERY PACK DESIGNED FOR COMPATIBILITY WITH THE TOUGHBOOK G2 STANDARD

The Capacitive Stylus Pen (FZ-VNP401U) is compatible for the TOUGHBOOK 40 model.

THE DESKTOP PORT REPLICATOR OR CRADLE (FZ-VEBA21U) IS COMPATIBLE FOR THE TOUGHBOOK A3 MODELS

THE ROTATING HAND STRAP WITH STAND (FZ-VSTA31U) IS DESIGNED AS A CARRYING SOLUTION FOR THE TOUGHBOOK A3

THE SHOULDER CASE (FZ-VNSS11U) IS DESIGNED FOR COMPATIBILITY WITH TOUGHBOOK S1

THE DESKTOP PORT REPLICATOR (FZ-VEB401U) IS DESIGNED TO PROVIDE CONNECTIVITY AND FUNCTIONALITY IN A DESKTOP ENVIRONMENT, FULLY COMPATIBLE FOR THE TOUGHBOOK 40

THE DESKTOP PORT REPLICATOR - WITH KENSINGTON LOCK SLOT (CF-VEB331U) IS A DESKTOP PORT REPLICATOR DESIGNED FOR COMPATIBILITY FOR TOUGHBOOK 33

THE DESKTOP PORT REPLICATOR OR CRADLE (FZ-VEBG21U) IS COMPATIBLE FOR THE TOUGHBOOK G2 MODELS